EXTREME ULTRAVIOLET LITHOGRAPHY : FROM THE TOPICAL MEETING, MAY 1-3, 1996, BOSTON, MASSACHUSETTS OSA TRENDS IN OPTICS AND PHOTONICS, VOLUME 4)
Washington: Optical Society of America, 1996. Quarto; VG-; Paperback; Spine, gold with white print; Cover has slight edgewear, else clean and bright; Text block clean and tight; ix, 235 pages, illustrated (b&w). [Oversized book(s). Additional postage necessary for expedited/international orders. Economy International shipping unavailable due to size/weight restrictions. For international/expedited customers, please inquire for rates].
1362679
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